About Us 

We always make the best

   WuXi Silicon Source Technology Co., Ltd. specializes in OEM (Original Equipment Manufacturing) of critical components for the semiconductor and display industries. We are dedicated to the research, development, production, and sales of a wide range of high-quality products designed to meet the rigorous demands of modern semiconductor manufacturing.

We can confirm the production of products according to drawing numbers. Additionally, we offer customization based on customer requirements. If you have any specific needs, please consult with us.

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Product Line

*Electrostatic Chucks (ESCs)

*Electrostatic Chuck with Heater Assemblies

*Ceramic, Quartz, and Silicon Carbide Products:

      Vacuum Chucks, Stage Parts

      Anti-Plasma Material Components

      SiC (Silicon Carbide) Polishing Plates

      Handling Arms

Applications

Our products are widely used in various semiconductor manufacturing processes, including:

Wafer handling

Physical Vapor Deposition (PVD)

Chemical Vapor Deposition (CVD)

Chemical Mechanical Planarization (CMP)

Etching (ETCH)

By focusing on these technologies and products, the company has secured an important position in the semiconductor and display industries, providing high-quality, high-performance critical components. It meets customer needs for consumable parts in the semiconductor industry, including spare parts for semiconductor equipment brands such as Applied Materials (AMAT), LAM, NOVELLUS, ORIEL, VARIAN, Tegal, SVG, and others.

Questions or Consulting

We are committed to excellence in everything we do and look forward to working with you!

WuXi Silicon Source Technology Co., Ltd. 

Contact Person: Denny Tan

E-mail: denny_tan@wxsistc.com

Tel: 86-510-85880927/Mobile:86-17388731979

ROOM 820, LONGSHAN BUILDING 555 LIANGQING ROAD WUXI, JIANGSU CHINA

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