Essential details
Shipping:Express delivery
Product Introduction
Application scenarios: photolithography machine, developer, motion platform, testing equipment.
Silicon carbide ring, ceramic vacuum chuck, chuck:
Size: Ø550 to Ø30mm
Flatness can reach: 2 to 0.5 microns
Parallelism can reach: 2 to 0.5 microns
Size: Ø550 to Ø30mm
Flatness can reach: 2 to 0.5 microns
Parallelism can reach: 2 to 0.5 microns