Polymer Electrostatic Materials

Polymer dielectric materials are currently the most widely used electrostatic chuck materials, with the most mature preparation process. After high polymer modification treatment, the electrical, mechanical, temperature resistance, and halogen resistance properties of polymer dielectric materials are significantly improved. The dielectric materials are patterned through integrated operations and then undergo multi-stage vacuum heavy-duty lamination, forming a dense dielectric insulation layer between the internal electrodes.

Polymer Electrostatic Chuck

• High Polymer Modification TechnologyAchieves high bulk resistivity and relative dielectric constant, ensuring more stable clamping force.
• High-Density Dielectric MaterialsReduces particulate risk and lowers ion migration rates.
• Versatile Clamping CapabilityCompatible with wafers made of various materials.
• Excellent Corrosion ResistancePerforms well in halogen and plasma atmospheres.
• Cost-Effective and Short Lead TimesSuitable for process development and new equipment validation.

Polymer Electrostatic Chuck With Heater

• Multi-Zone Heating LayoutCapable of implementing multiple heating zones (up to 20 zones) with excellent temperature uniformity (±5%℃ @150℃).
• High-Density Lamination TechnologyAchieved through vacuum lamination, with a maximum heating temperature of 200℃.
• Uniform Heating CurvesOffers a wide range of heating curve settings.
• Cost-Effective and Short Lead TimesSuitable for process development and new equipment validation.