Ceramic suction cups, carrier plates, grinding and polishing plates and sealing rings

Application scenarios: CVD PVD ETCH CMP
Material: high-purity alumina, alumina-reinforced ceramics
Purity: 99.9%, 99.8% and 99.7% materials

Size: Ø933, Ø576, Ø485, Ø360, Ø280 and Ø150*10~40mm
Flatness can reach: 0.5~0.3 microns
Parallelism can reach: 2~0.5 microns