Ceramic Concretion Technology

Ceramic concretion technology is an improved sintering process developed during the research and development of alumina/aluminum nitride ceramic electrostatic chucks and heaters. The core of this technology involves using various nano-sized ceramic powders mixed in specific proportions through unique stirring equipment and processes. These mixtures are then spray granulated and sintered in sintering equipment following a specific temperature curve, resulting in highly dense, stable crystal structures with uniform bulk resistivity distribution. Electrostatic chucks manufactured using ceramic concretion technology exhibit high density, stable crystal structures, and uniform bulk resistivity distribution, ensuring reliable wafer clamping performance in harsh environments such as high vacuum, plasma, and halogen.

Al₂O₃ Electrostatic Chuck

• Consistent Clamping Force: Utilizes ceramic concretion technology and co-firing process to control bulk resistivity, achieving more durable clamping force.
• High-Temperature Sintering: Ensures high internal density and stable crystal structure, allowing clamping force across a wider temperature range.
• Integrated Co-Firing: Reduces ion migration, ensuring long-term durability.
• Durability: Capable of prolonged operation in plasma and halogen vacuum environments.

AlN Electrostatic Chuck

• Controlled Composition: Achieves precise bulk resistivity control through the adjustment of concrete material composition and ratios, ensuring clamping force across a broader temperature range.
• Uniform Temperature Zones: Ensured by ceramic concretion sintering technology and co-firing process.
• High-Quality Manufacturing: Integrated co-firing maximizes product quality.
• Durability: Capable of prolonged operation in plasma and halogen vacuum environments.

Ceramics Electrostatic Chuck With Heater

• Multi-Zone Heating Layout: Capable of implementing multiple heating zones with excellent temperature uniformity (±7.5%℃ @350℃).
• High-Density Sintering: Achieved through vacuum lamination sintering technology, with a maximum heating temperature of 550℃.
• High-Quality Manufacturing: Integrated co-firing maximizes product quality.
• Durability: Capable of prolonged operation in plasma and halogen vacuum environments.